• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

通过蒙特卡罗模拟优化粗糙表面直线度测量

Optimization of the straightness measurements on rough surfaces by Monte Carlo simulation.

作者信息

Hennebelle F, Coorevits T, Bigerelle M

机构信息

Laboratoire d'Electronique, Informatique et Image, UMR CNRS 6306, Université de Bourgogne, Auxerre Cedex, France; Centre Technique des Industries Mécaniques (CETIM), Pôle Expertise, Métrologie, Etalonnage, Senlis, France.

出版信息

Scanning. 2014 Jan-Feb;36(1):161-9. doi: 10.1002/sca.21114. Epub 2013 Jul 22.

DOI:10.1002/sca.21114
PMID:23878092
Abstract

The straightness error of a coordinate measuring machine (CMM) is determined by measuring a rule standard. Thanks to a reversal technique, the straightness uncertainty of the CMM is theoretically dissociated from the straightness uncertainty of the rule. However, stochastic variations of the whole measurement system involve uncertainties of the CMM straightness error. To quantify these uncertainties, different sources of stochastic variations are listed with their associated probability density functions. Then Monte Carlo methods are performed first to quantify error and secondly to optimize measurement protocol. It is shown that a 5-measurement distance from 0.1 mm to each measurement coordinate allows a double reduction of uncertainties, principally due to the rule roughness amplitude (R(a) = 0.35 µm) and because this optimal distance of 0.1 mm is equal to the autocorrelation length of the rule roughness. With this optimal configuration, the final uncertainly on the straightness error of the CMM studied is less than 1 µm on the whole evaluated length of the rule (1 m). An algorithm, including Probe Tip Radius of the CMM and surface roughness of the piece, is finally proposed to increase CMM reliability by minimizing error measurements due to surface roughness of the measured piece.

摘要

坐标测量机(CMM)的直线度误差通过测量标准尺来确定。借助反转技术,CMM的直线度不确定度在理论上与标准尺的直线度不确定度分离。然而,整个测量系统的随机变化会带来CMM直线度误差的不确定度。为了量化这些不确定度,列出了不同的随机变化源及其相关的概率密度函数。然后首先采用蒙特卡罗方法来量化误差,其次对测量方案进行优化。结果表明,从每个测量坐标到0.1mm的5次测量距离可使不确定度降低一半,这主要归因于标准尺粗糙度幅度(R(a)=0.35µm),并且因为0.1mm的这个最佳距离等于标准尺粗糙度的自相关长度。采用这种最佳配置,在所研究的CMM直线度误差上,在标准尺的整个评估长度(1m)上最终不确定度小于1µm。最后提出了一种算法,该算法包括CMM的探头半径和工件的表面粗糙度,以通过最小化由于被测工件表面粗糙度引起的误差测量来提高CMM的可靠性。

相似文献

1
Optimization of the straightness measurements on rough surfaces by Monte Carlo simulation.通过蒙特卡罗模拟优化粗糙表面直线度测量
Scanning. 2014 Jan-Feb;36(1):161-9. doi: 10.1002/sca.21114. Epub 2013 Jul 22.
2
A heterodyne straightness and displacement measuring interferometer with laser beam drift compensation for long-travel linear stage metrology.一种用于长行程线性平台计量的具有激光束漂移补偿功能的外差式直线度和位移测量干涉仪。
Rev Sci Instrum. 2017 Mar;88(3):035114. doi: 10.1063/1.4978802.
3
Uncertainty propagation from probe spacing to Fourier 3-probe straightness measurement.从探头间距到傅里叶三探头直线度测量的不确定度传播。
ISA Trans. 2024 Nov;154:465-475. doi: 10.1016/j.isatra.2024.08.011. Epub 2024 Aug 11.
4
Integration of Error Compensation of Coordinate Measuring Machines into Feature Measurement: Part I-Model Development.坐标测量机的误差补偿融入特征测量:第一部分——模型开发
Sensors (Basel). 2016 Sep 29;16(10):1610. doi: 10.3390/s16101610.
5
Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters.具有旋转误差补偿和六自由度误差参数同步测量功能的激光直线度干涉仪系统。
Opt Express. 2015 Apr 6;23(7):9052-73. doi: 10.1364/OE.23.009052.
6
Laser homodyne straightness interferometer with simultaneous measurement of six degrees of freedom motion errors for precision linear stage metrology.用于精密线性工作台计量的同时测量六个自由度运动误差的激光零差直线度干涉仪。
Opt Express. 2017 Mar 20;25(6):6805-6821. doi: 10.1364/OE.25.006805.
7
Splicing Measurement and Compensation of Straightness Errors for Ultra-Precision Guideways.超精密导轨直线度误差的拼接测量与补偿
Micromachines (Basel). 2023 Aug 26;14(9):1670. doi: 10.3390/mi14091670.
8
Microform Calibration Uncertainties of Rockwell Diamond Indenters.洛氏金刚石压头的缩微校准不确定度
J Res Natl Inst Stand Technol. 1995 Sep-Oct;100(5):543-561. doi: 10.6028/jres.100.041.
9
Integration of Error Compensation of Coordinate Measuring Machines into Feature Measurement: Part II-Experimental Implementation.坐标测量机误差补偿在特征测量中的集成:第二部分——实验实现
Sensors (Basel). 2016 Oct 14;16(10):1705. doi: 10.3390/s16101705.
10
Particle swarm algorithm-based identification method of optimal measurement area of coordinate measuring machine.基于粒子群算法的坐标测量机最佳测量区域识别方法
Rev Sci Instrum. 2024 Aug 1;95(8). doi: 10.1063/5.0206876.