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超精密导轨直线度误差的拼接测量与补偿

Splicing Measurement and Compensation of Straightness Errors for Ultra-Precision Guideways.

作者信息

Zhou Lian, Zheng Nan, Li Jie, Yuan Zhigang, Wang Jian, Fang Fei, Xu Qiao

机构信息

Research Center of Laser Fusion, China Academy of Engineering Physics, Chengdu 610093, China.

出版信息

Micromachines (Basel). 2023 Aug 26;14(9):1670. doi: 10.3390/mi14091670.

DOI:10.3390/mi14091670
PMID:37763833
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10537857/
Abstract

The straightness error of guideways is one of the key indicators of an ultra-precision machine, which plays an important role in the machining accuracy of a workpiece. In order to measure the straightness error of a long-distance ultra-precision guideway accurately, a splicing measurement for the straightness error of a guideway using a high-precision flat mirror and displacement sensor was proposed in this paper, and the data splicing processing algorithm based on coordinate transformation was studied. Then, comparative experiments on a splicing measurement and direct measurement of the straightness error were carried out on a hydrostatic guideway grinder. The maximum difference between the two measurements was 0.3 μm, which was far less than the straightness error of 5.8 μm. The experiment demonstrated the correctness of the proposed splicing measurement method and data processing algorithm. To suppress the influence of the straightness error on machining accuracy, a straightness error compensation algorithm based on error rotation transformation and vertical axis position correction was proposed, and the grinding experiment of a plane optics with a size of 1400 mm × 500 mm was carried out. Without error compensation grinding, the flatness error of the element was 7.54 μm. After error compensation grinding, the flatness error was significantly reduced to 2.98 μm, which was less than the straightness errors of the guideways. These results demonstrated that the straightness error of the grinding machine had been well suppressed.

摘要

导轨直线度误差是超精密机床的关键指标之一，对工件的加工精度起着重要作用。为了精确测量长距离超精密导轨的直线度误差，本文提出了一种利用高精度平面镜和位移传感器对导轨直线度误差进行拼接测量的方法，并研究了基于坐标变换的数据拼接处理算法。然后，在液体静压导轨磨床上对直线度误差的拼接测量和直接测量进行了对比实验。两种测量方法的最大差值为0.3μm，远小于5.8μm的直线度误差。实验验证了所提拼接测量方法和数据处理算法的正确性。为抑制直线度误差对加工精度的影响，提出了一种基于误差旋转变换和垂直轴位置校正的直线度误差补偿算法，并进行了尺寸为1400mm×500mm的平面光学元件的磨削实验。在无误差补偿磨削时，元件的平面度误差为7.54μm。经过误差补偿磨削后，平面度误差显著降低至2.98μm，小于导轨的直线度误差。这些结果表明，磨床的直线度误差得到了有效抑制。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7f2a/10537857/e9682d9806e9/micromachines-14-01670-g017.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7f2a/10537857/b736f439a5cf/micromachines-14-01670-g011.jpg
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Beam drift reduction by straightness measurement based on a digital optical phase conjugation.
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Two-dimensional straightness measurement based on optical knife-edge sensing.基于光学刀口传感的二维直线度测量
Rev Sci Instrum. 2017 Sep;88(9):095109. doi: 10.1063/1.5002711.