Stanford University, Stanford, CA, 94305, USA.
Small. 2014 Jan 29;10(2):253-7. doi: 10.1002/smll.201300130. Epub 2013 Jul 25.
A significant improvement of adhesion in thin-film structures is demonstrated using embedded ceramic-like amorphous silicon carbide films (a-SiC:H films). a-SiC:H films exhibit plasticity at the nanoscale and outstanding chemical and thermal stability unlike most materials. The multi-functionality and the ease of processing of the films have potential to offer a new toughening strategy for reliability of nanoscale device structures.
采用嵌入式陶瓷状非晶硅碳化硅薄膜（a-SiC:H 薄膜），显著提高了薄膜结构的附着力。与大多数材料不同，a-SiC:H 薄膜在纳米尺度表现出塑性，具有优异的化学和热稳定性。该薄膜具有多功能性和易于加工的特点，有望为纳米器件结构的可靠性提供一种新的增韧策略。
