Department of Materials Science & Engineering, University of Delaware, Newark, Delaware 19716, USA.
Opt Lett. 2013 Aug 1;38(15):2779-82. doi: 10.1364/OL.38.002779.
We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass (ChG) on CaF2 substrates by combing photolithographic patterning and focused ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality factor of ~2000 was measured near the critical coupling regime.
我们已经展示了我们认为的第一个在中红外波段工作的波导光子晶体腔。这些器件是通过结合光刻图形化和聚焦离子束铣削工艺，在 CaF2 衬底上的 Ge23Sb7S70 硫属玻璃（ChG）上制作而成的。使用光纤端射耦合方法在 5.2μm 波长下对波导耦合腔进行了表征，在临界耦合区域附近测量到了约 2000 的负载品质因数。
