Department of Materials Science and Engineering, University of Delaware, Newark, Delaware 19716, USA.
Opt Lett. 2013 May 1;38(9):1470-2. doi: 10.1364/OL.38.001470.
We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×10(5) at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
我们展示了使用光学光刻和剥离工艺在硅上制造的具有高折射率对比度、波导耦合的 As2Se3 硫属玻璃微谐振器。该微谐振器在 5.2μm 波长下表现出 2×10(5)的高固有品质因数，这是在片上中红外 (mid-IR) 光子器件中报道的最高值之一。该微谐振器可用作中红外平面光子电路的关键构建模块。
