Xue Qing-Sheng, Wang Shu-Rong
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
Guang Pu Xue Yu Guang Pu Fen Xi. 2013 May;33(5):1433-7.
Based on the geometrical aberration theory, a optimum-design method for designing an imaging spectrometer based on toroidal uniform grating spectrometer is proposed. To obtain the best optical parameters, twice optimization is carried out using genetic algorithm(GA) and optical design software ZEMAX A far-ultraviolet(FUV) imaging spectrometer is designed using this method. The working waveband is 110-180 nm, the slit size is 50 microm x 5 mm, and the numerical aperture is 0.1. Using ZEMAX software, the design result is analyzed and evaluated. The results indicate that the MTF for different wavelengths is higher than 0.7 at Nyquist frequency 10 lp x mm(-1), and the RMS spot radius is less than 14 microm. The good imaging quality is achieved over the whole working waveband, the design requirements of spatial resolution 0.5 mrad and spectral resolution 0.6 nm are satisfied. It is certificated that the optimum-design method proposed in this paper is feasible. This method can be applied in other waveband, and is an instruction method for designing grating-dispersion imaging spectrometers.
基于几何像差理论，提出了一种基于环形均匀光栅光谱仪设计成像光谱仪的优化设计方法。为了获得最佳光学参数，使用遗传算法（GA）和光学设计软件ZEMAX进行了两次优化。利用该方法设计了一台远紫外（FUV）成像光谱仪。其工作波段为110 - 180nm，狭缝尺寸为50μm×5mm，数值孔径为0.1。利用ZEMAX软件对设计结果进行了分析和评估。结果表明，在奈奎斯特频率10lp×mm⁻¹时，不同波长的调制传递函数（MTF）高于0.7，均方根光斑半径小于14μm。在整个工作波段实现了良好的成像质量，满足了空间分辨率0.5mrad和光谱分辨率0.6nm的设计要求。证明了本文提出的优化设计方法是可行的。该方法可应用于其他波段，是光栅色散成像光谱仪设计的一种指导方法。
