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金纳米粒子沉积在无连接剂的硅衬底上,并嵌入在铝肖特基接触中。

Gold nanoparticles deposited on linker-free silicon substrate and embedded in aluminum Schottky contact.

机构信息

Electronic Materials Research Group, School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, 14300 Nibong Tebal, Pulau Pinang, Malaysia.

出版信息

J Colloid Interface Sci. 2013 Oct 15;408:220-8. doi: 10.1016/j.jcis.2013.07.026. Epub 2013 Jul 25.

Abstract

Given the enormous importance of Au nanoparticles (NPs) deposition on Si substrates as the precursor for various applications, we present an alternative approach to deposit Au NPs on linker-free n- and p-type Si substrates. It is demonstrated that, all conditions being similar, there is a significant difference between densities of the deposited NPs on both substrates. The Zeta-potential and polarity of charges surrounding the hydroxylamine reduced seeded growth Au NPs, are determined by a Zetasizer. To investigate the surface properties of Si substrates, contact angle measurement is performed. Field-emission scanning electron microscope is then utilized to distinguish the NPs density on the substrates. Finally, Al/Si Schottky barrier diodes with embedded Au NPs are fabricated, and their structural and electrical characteristics are further evaluated using an energy-filtered transmission electron microscope and current-voltage measurements, respectively. The results reveal that the density of NPs is significantly higher on n-type Si substrate and consequently has more pronounced effects on the electrical characteristics of the diode. It is concluded that protonation of Si-OH group on Si surface in low pH is responsible for the immobilization of Au NPs, which eventually contributes to the lowering of barrier height and enhances the electrical characteristics.

摘要

鉴于 Au 纳米粒子(NPs)在 Si 衬底上沉积作为各种应用的前体的重要性,我们提出了一种在无连接剂的 n 型和 p 型 Si 衬底上沉积 Au NPs 的替代方法。结果表明,在所有条件相同的情况下,沉积在两种衬底上的 NPs 密度存在显著差异。通过 Zetasizer 确定了围绕羟胺还原的种子生长 Au NPs 的 Zeta 电位和电荷极性。为了研究 Si 衬底的表面性质,进行了接触角测量。然后利用场发射扫描电子显微镜来区分衬底上的 NPs 密度。最后,制造了嵌入 Au NPs 的 Al/Si 肖特基势垒二极管,并分别使用能量过滤透射电子显微镜和电流-电压测量进一步评估它们的结构和电学特性。结果表明,n 型 Si 衬底上的 NPs 密度显著更高,因此对二极管的电学特性有更显著的影响。结论是,Si 表面 Si-OH 基团在低 pH 下的质子化负责 Au NPs 的固定,这最终导致势垒高度降低,并增强了电学特性。

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