Faculty of Engineering, Shizuoka University, Johoku, Naka-ku, Hamamatsu 432-8561, Japan; Research Institute of Electronics, Shizuoka University, Johoku, Naka-ku, Hamamatsu 432-8011, Japan.
Ultramicroscopy. 2013 Oct;133:88-94. doi: 10.1016/j.ultramic.2013.06.014. Epub 2013 Jul 12.
The atomic force microscope (AFM) has been widely used for surface fabrication and manipulation. However, nanomanipulation using a conventional AFM is inefficient because of the sequential nature of the scan-manipulation scan cycle, which makes it difficult for the operator to observe the region of interest and perform the manipulation simultaneously. In this paper, a nanomanipulation technique using a high-speed atomic force microscope (HS-AFM) is described. During manipulation using the AFM probe, the operation is periodically interrupted for a fraction of a second for high-speed imaging that allows the topographical image of the manipulated surface to be periodically updated. With the use of high-speed imaging, the interrupting time for imaging can be greatly reduced, and as a result, the operator almost does not notice the blink time of the interruption for imaging during the manipulation. This creates a more intuitive interface with greater feedback and finesse to the operator. Nanofabrication under real-time monitoring was performed to demonstrate the utility of this arrangement for real-time nanomanipulation of sample surfaces under ambient conditions. Furthermore, the HS-AFM is coupled with a haptic device for the human interface, enabling the operator to move the HS-AFM probe to any position on the surface while feeling the response from the surface during the manipulation.
原子力显微镜（AFM）已广泛用于表面制造和操作。然而，由于扫描-操作-扫描周期的顺序性质，传统的 AFM 进行纳米操作效率低下，这使得操作人员难以同时观察感兴趣的区域和执行操作。本文描述了一种使用高速原子力显微镜（HS-AFM）的纳米操作技术。在使用 AFM 探针进行操作时，周期性地中断操作一小段时间进行高速成像，允许周期性地更新被操作表面的形貌图像。使用高速成像，可以大大减少成像的中断时间，并且在操作期间，操作人员几乎不会注意到成像中断的闪烁时间。这为操作人员提供了一个更直观、反馈更好、更精细的界面。在实时监测下进行了纳米制造，以证明这种安排在环境条件下实时纳米操作样品表面的实用性。此外，HS-AFM 与触觉设备相结合，用于人机界面，使得操作人员能够在操作过程中感受到表面的响应，将 HS-AFM 探针移动到表面上的任何位置。
