Shavrin Igor, Lipiäinen Lauri, Kokkonen Kimmo, Novotny Steffen, Kaivola Matti, Ludvigsen Hanne
Fiber Optics Group, Department of Micro and Nanosciences, Aalto University, PO Box 13500, FI-00076 Aalto, Finland.
Opt Express. 2013 Jul 15;21(14):16901-7. doi: 10.1364/OE.21.016901.
We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.
我们描述了一种基于发光二极管的频闪白光干涉仪和一种数据分析方法，它们能够以亚纳米振幅分辨率绘制电激励微结构中的平面外表面振动场，振动频率范围高达数十兆赫。完全在频域中执行的数据分析利用了测量的干涉相位数据中可用的高分辨率。为了进行演示，我们对一个方形平板硅微机电系统谐振器中的表面振动场进行成像，该谐振器有三种频率在3至14兆赫之间的振动模式。在这种情况下，最小可检测振动幅度小于100皮米。
