Cherchi Matteo, Ylinen Sami, Harjanne Mikko, Kapulainen Markku, Aalto Timo
VTT Technical Research Centre of Finland, Espoo, 02040, Finland.
Opt Express. 2013 Jul 29;21(15):17814-23. doi: 10.1364/OE.21.017814.
We demonstrate theoretically and experimentally how highly multimodal high index contrast waveguides with micron-scale cores can be bent, on an ultra-broad band of operation, with bending radii below 10 µm and losses for the fundamental mode below 0.02 dB/90°. The bends have been designed based on the Euler spiral and fabricated on 4 µm thick SOI. The proposed approach enabled also the realization of 180° bends with 1.27 µm effective radii and 0.09 dB loss, which are the smallest low-loss bends ever reported for an optical waveguide. These results pave the way for unprecedented integration density in most semiconductor platforms.
我们通过理论和实验证明,具有微米级纤芯的高度多模高折射率对比度波导如何在超宽带工作范围内弯曲,弯曲半径低于10微米,基模损耗低于0.02分贝/90°。这些弯曲结构基于欧拉螺旋设计,并制作在4微米厚的绝缘体上硅(SOI)材料上。所提出的方法还实现了有效半径为1.27微米、损耗为0.09分贝的180°弯曲,这是有史以来报道的光波导中最小的低损耗弯曲。这些结果为大多数半导体平台实现前所未有的集成密度铺平了道路。