Department of Integrated Systems Engineering, The Ohio State University, Columbus, Ohio 43210, USA.
Opt Lett. 2013 Jul 15;38(14):2625-8. doi: 10.1364/OL.38.002625.
Despite many attractive properties and well-developed micro/nano manufacturing technologies based on silicon (Si) wafers, severe adhesions between Si and glass at high temperature have limited its application as a mold material in precision glass molding. In this Letter, a coating using carbide-bonded graphene is introduced to build nonstick Si molds for glass molding. The coating has extraordinary mechanical properties and can effectively prevent Si-glass adhesion under high temperature. We demonstrated fabrications of a Fresnel lens and glass parts with micrometer pillars using graphene-coated Si molds. This newly developed process enables the use of Si as a mold material to fabricate sophisticated structures with high-precision dimensions that was not previously available. This technology will greatly improve precision glass molding process and allow high-precision low-cost glass optics to be manufactured in large quantity.
尽管硅（Si）晶圆具有许多吸引人的特性和成熟的微/纳米制造技术，但 Si 与玻璃在高温下的严重粘连限制了其作为精密玻璃成型用模具材料的应用。在本函中，我们介绍了一种使用碳化物结合的石墨烯涂层来构建用于玻璃成型的不粘 Si 模具的方法。该涂层具有非凡的机械性能，可以有效地防止高温下 Si-玻璃的粘连。我们使用石墨烯涂层的 Si 模具展示了菲涅耳透镜和带有微柱的玻璃部件的制造。这个新开发的工艺使 Si 能够用作模具材料，制造以前无法获得的具有高精度尺寸的复杂结构。这项技术将极大地改进精密玻璃成型工艺，并允许大量制造高精度低成本的玻璃光学元件。
