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结合激光烧蚀与金刚石切割加工双凸透镜硅模具

Machining of Lenticular Lens Silicon Molds with a Combination of Laser Ablation and Diamond Cutting.

作者信息

Han Jide, Li Lihua, Lee Wingbun

机构信息

The State Key Laboratory of Ultraprecision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong, China.

出版信息

Micromachines (Basel). 2019 Apr 16;10(4):250. doi: 10.3390/mi10040250.

Abstract

Lenticular lenses are widely used in the three-dimensional display industry. Conventional lenticular lens components are made of plastics that have low thermal stability. An alternative is to use glass to replace plastic as the lenticular lens component material. Single crystal silicon is often used as the mold material in the precision glass molding process. It is, however, difficult to fabricate a lenticular lens silicon mold that has a large feature size compared to the critical depth of cut of silicon. In order to solve the problems of machining lenticular lens silicon molds using the conventional diamond cutting method, such as low machining efficiency and severe tool wear, a hybrid machining method that combined laser ablation and diamond cutting was proposed. A feasibility study was performed to investigate the possibility of using this method to fabricate a lenticular lens silicon mold. The influence of the laser parameters and machining parameters on the machining performance was investigated systematically. The experimental results indicated that this hybrid machining method could be a possible method for manufacturing lenticular lens silicon molds or other similar microstructures.

摘要

柱面透镜在三维显示行业中得到广泛应用。传统的柱面透镜组件由热稳定性低的塑料制成。一种替代方法是使用玻璃来替代塑料作为柱面透镜组件材料。在精密玻璃成型工艺中,单晶硅常被用作模具材料。然而,与硅的临界切削深度相比,制造具有大特征尺寸的柱面透镜硅模具是困难的。为了解决使用传统金刚石切割方法加工柱面透镜硅模具时存在的加工效率低和刀具磨损严重等问题,提出了一种将激光烧蚀和金刚石切割相结合的混合加工方法。进行了一项可行性研究,以研究使用该方法制造柱面透镜硅模具的可能性。系统地研究了激光参数和加工参数对加工性能的影响。实验结果表明,这种混合加工方法可能是制造柱面透镜硅模具或其他类似微结构的一种可行方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fee/6523657/d9a560e9ea30/micromachines-10-00250-g001.jpg

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