Department of Chemical and Biomedical Engineering, University of South Florida, 4202 East Fowler Avenue ENB 118, Tampa, FL 33620, USA.
Nanotechnology. 2013 Sep 20;24(37):375301. doi: 10.1088/0957-4484/24/37/375301. Epub 2013 Aug 21.
A hydrothermal synthesis of densely packed ZnO nanowires was realized in a confined space via forced circulation of the heated growth solution through microfluidic channels formed primarily by a set of high aspect ratio trenches in a Si substrate. A uniform and conformal seeding layer of ZnO was deposited to cover the entire surface of the trenches by means of atomic layer deposition (ALD). Densely packed ZnO nanowires were formed inside the trenches with particularly good coverage over the sidewalls, where they would not grow effectively through a conventional hydrothermal method. The strategy for controlled growth of densely packed ZnO nanowires over such high aspect ratio microstructures is deemed beneficial when these microstructures are employed as electrodes with high specific surface areas for devices such as supercapacitors or any other electrochemical devices.
通过在硅衬底中的一组高纵横比沟槽中形成的微流道，强制循环加热的生长溶液，在受限空间中实现了密集堆积的氧化锌纳米线的水热合成。通过原子层沉积（ALD），在沟槽的整个表面上沉积了均匀且保形的 ZnO 种子层。在沟槽内部形成了密集堆积的氧化锌纳米线，在侧壁上具有特别好的覆盖效果，而在侧壁上，通过传统的水热法它们无法有效生长。当这些微结构用作具有高比表面积的电极时，例如超级电容器或任何其他电化学器件，这种用于在高纵横比微结构上控制生长密集堆积的氧化锌纳米线的策略被认为是有益的。
