Advanced Technology R&D Center, Mitsubishi Electric Corporation, Amagasaki, Hyogo, Japan.
Opt Lett. 2013 Sep 1;38(17):3291-3. doi: 10.1364/OL.38.003291.
A transverse-flow radio-frequency-exited CO2 laser amplifier was evaluated by a short-pulse seed laser. We constructed a prototype transverse-flow amplifier for the extreme UV laser-produced-plasma source. The electrical power for the discharge was enhanced to 100 kW at a 100% duty cycle. A Q-switched cavity-dumped CO2 seed laser emitting 13 ns pulses with a repetition rate of 100 kHz was amplified along a fivefold optical path in the amplifier gain medium. As a result, the amplifier output an average power of 3.07 kW with an 8.5 W laser input. The electrical-to-optical efficiency was 3.1%, which was far higher than that of axial-flow amplifiers at the same laser input power. The pulse showed a slight stretch from an input duration of 13 ns to an output of 15 ns.
采用短脉冲种子激光对横流射频激励 CO2 激光放大器进行了评估。我们为极紫外激光等离子体光源构建了一个横流放大器原型。放电的电功率在 100%占空比下提高到 100kW。一台 Q 开关腔 dumped CO2 种子激光器以 100kHz 的重复率发射 13ns 脉冲，在放大器增益介质中沿五倍光程放大。结果，放大器以 8.5W 的激光输入输出了 3.07kW 的平均功率。电光效率为 3.1%，远高于相同激光输入功率下的轴向流放大器。脉冲从输入持续时间 13ns 略微展宽到输出的 15ns。
