Nowak Krzysztof M, Ohta Takeshi, Suganuma Takashi, Fujimoto Junichi, Mizoguchi Hakaru, Sumitani Akira, Endo Akira
Opt Lett. 2014 Apr 1;39(7):1953-6. doi: 10.1364/OL.39.001953.
In this Letter, we report on recent experimental results of a short pulse amplification at 10.6 μm wavelength required to drive a tin laser-produced plasma (LPP) extreme ultraviolet (UV) source. We report for the first time, to our best knowledge, a highly efficient pulsed amplification in a multipass amplifier built on RF-discharge-excited, diffusion-cooled CO2, planar waveguide industrial CO2 laser. About 2 kW of output average power was obtained from about 100 W input average power in ∼15 ns pulses at 100 kHz pulse repetition frequency. As much as 60% relative extraction efficiency, as compared to continuous-wave amplification in similar conditions, and 5.8% wall-plug efficiency was recorded and believed to be the highest reported so far. An improvement of extraction efficiency by ∼10% is reported when driving the amplifier with two lines of CO2 regular band in good agreement with expectations.
在本信函中，我们报告了驱动锡激光产生等离子体（LPP）极紫外（UV）源所需的10.6μm波长短脉冲放大的最新实验结果。据我们所知，我们首次报道了在基于射频放电激发、扩散冷却的CO2平面波导工业CO2激光器构建的多程放大器中实现的高效脉冲放大。在100kHz脉冲重复频率下，约15ns脉冲中，从约100W输入平均功率获得了约2kW的输出平均功率。与类似条件下的连续波放大相比，记录到相对提取效率高达60%，壁插效率为5.8%，据信这是迄今为止报道的最高值。报告称，当用两条CO2常规带线驱动放大器时，提取效率提高了约10%，这与预期非常吻合。
