Zhang Xiaomin, Armani Andrea M
Opt Express. 2013 Oct 7;21(20):23592-603. doi: 10.1364/OE.21.023592.
Due to their wide operating range, silica toroidal whispering gallery mode microresonators have enabled numerous applications from fundamental physics to lasing and sensing. However, the integration of a waveguide with these microresonators has not been achieved which limits their integration with additional on-chip components. Here, we demonstrate a novel approach for monolithically integrating a silica microtoroid with an on-chip waveguide to form a fully integrated microtoroid-waveguide system with quality factors in excess of 4 million. Similar to the conventional toroidal cavities, power-independent operation is demonstrated. UV and temperature sensing experiments are also performed using the monolithically integrated microtoroid-waveguide system.
由于其宽广的工作范围，二氧化硅环形回音壁模式微谐振器已实现了从基础物理到激光和传感等众多应用。然而，尚未实现这些微谐振器与波导的集成，这限制了它们与其他片上组件的集成。在此，我们展示了一种将二氧化硅微环与片上波导单片集成的新方法，以形成品质因数超过400万的完全集成微环 - 波导系统。与传统环形腔类似，展示了与功率无关的操作。还使用单片集成微环 - 波导系统进行了紫外线和温度传感实验。
