Choubey Ambar, Singh Amol, Modi M H, Upadhyaya B N, Lodha G S, Oak S M
Appl Opt. 2013 Nov 1;52(31):7540-8. doi: 10.1364/AO.52.007540.
A study on effective laser cleaning of gold layer deposited on fused silica substrates used in beamlines of synchrotron radiation (SR) sources using nanosecond-pulsed Nd:YAG laser has been carried out. The influence of pulse duration, beam incidence angle, spot overlapping, laser fluence, and number of passes on cleaning efficiency has been investigated. An approximately 48 nm thick gold layer from a mirror surface area of ~48 cm2 has been cleaned in 3 min. Laser clean quality and efficiency has been analyzed using microscope, scanning electron microscope (SEM), and angle-dependent reflectivity measurement techniques using SR beamline. Optimization of cleaning parameters resulted in a cleaning efficiency of ~98%. This study provides an alternate and low-cost solution for reuse of gold-coated, damaged mirrors.
利用纳秒脉冲Nd:YAG激光对同步辐射（SR）光源光束线中使用的熔融石英衬底上沉积的金层进行有效激光清洗的研究已经展开。研究了脉冲持续时间、光束入射角、光斑重叠、激光能量密度和扫描次数对清洗效率的影响。在3分钟内清洗了约48平方厘米镜面面积上约48纳米厚的金层。使用显微镜、扫描电子显微镜（SEM）以及利用SR光束线的角度相关反射率测量技术对激光清洗质量和效率进行了分析。清洗参数的优化使清洗效率达到了约98%。这项研究为重复使用镀有金层的受损镜面提供了一种替代且低成本的解决方案。
