Chegal Won, Lee Jeong Pyo, Cho Hyun Mo, Han Sang-Wook, Cho Yong Jai
J Opt Soc Am A Opt Image Sci Vis. 2013 Jul 1;30(7):1310-9. doi: 10.1364/JOSAA.30.001310.
We developed a multichannel three-polarizer spectroscopic ellipsometer based on a data acquisition algorithm for achieving optimized precision. This algorithm measures unnormalized Fourier coefficients accurately and precisely. Offset angles for optical elements were obtained as wavelength-independent values using regression calibration. Derived subsets of data reduction functions were used to calculate sample parameters. Correlation coefficients of Fourier coefficients were used to calculate errors in the sample parameters. Mean standard deviations of the sample parameters for each data reduction method were compared to identify the best method. This approach could be used to identify suitable precision optimization methods for other rotating-element ellipsometers.
我们基于一种数据采集算法开发了一种多通道三偏振器光谱椭偏仪，以实现优化精度。该算法能准确且精确地测量未归一化的傅里叶系数。利用回归校准获得与波长无关的光学元件偏移角值。使用数据约简函数的派生子集来计算样品参数。傅里叶系数的相关系数用于计算样品参数的误差。比较每种数据约简方法的样品参数平均标准偏差，以确定最佳方法。这种方法可用于为其他旋转元件椭偏仪识别合适的精度优化方法。
