Department of Chemical & Biomolecular Engineering (BK 21 Graduate Program), Korea Advanced Institute of Science and Technology (KAIST) , 335 Gwahangno, Yuseong-gu, Daejeon 305-701, Republic of Korea.
Langmuir. 2014 Jan 14;30(1):103-9. doi: 10.1021/la404218x. Epub 2013 Dec 24.
The self-assembly of colloidal spheres is an effective strategy for producing nanopatterns. To use colloidal crystals in lithographic applications, the key challenge is to fabricate a monolayer of colloidal crystals uniformly over a large area. A simple and effective method for fabricating a colloidal crystals monolayer from a 3D colloidal crystal is described. The top layer of a surface-etched 3D colloidal crystal is picked up on a PDMS stamp, and by simply heating the receiving substrate, the polymeric colloidal crystal can be easily transferred to many types of substrates, including curved or flexible materials, without utilizing a glue layer. Moreover, the colloidal spheres are deformed to hemispheres during the transfer process, which is a suitable form of a lithographic mask for both dry and wet etching processes. An array of silicon nanocones and gold dots is demonstrated by pattern transfer from an array of hemispherical polymeric particles. In addition, it is also shown that the transferred hemispherical array has good antireflective properties.
胶体球的自组装是一种产生纳米图案的有效策略。为了在光刻应用中使用胶体晶体，关键的挑战是在大面积上均匀地制造单层胶体晶体。本文描述了一种从三维胶体晶体制备胶体晶体单层的简单而有效的方法。表面刻蚀的三维胶体晶体的顶层被拾取到 PDMS 印章上，并且通过简单地加热接收基底，可以容易地将聚合胶体晶体转移到许多类型的基底上，包括弯曲或柔性材料，而不利用胶层。此外，胶体球在转移过程中变形为半球体，这是干蚀刻和湿蚀刻工艺都适合的光刻掩模形式。通过从半球形聚合物粒子阵列转移，演示了硅纳米锥和金点的阵列。此外，还表明转移的半球形阵列具有良好的抗反射性能。
