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Lateral resolution enhancement of vertical scanning interferometry by sub-pixel sampling.

作者信息

Arvidson Rolf S, Fischer Cornelius, Sawyer Dale S, Scott Gavin D, Natelson Douglas, Lüttge Andreas

机构信息

MARUM/Geowissenschaften FB5, Klagenfurter Straße, Universität Bremen, 28359 Bremen, Germany.

Department of Earth Science MS-126, Rice University, 6100 Main Street, Houston, TX 77005, USA.

出版信息

Microsc Microanal. 2014 Feb;20(1):90-8. doi: 10.1017/S1431927613013822. Epub 2014 Jan 7.

DOI:10.1017/S1431927613013822
PMID:24397923
Abstract

We apply common image enhancement principles and sub-pixel sample positioning to achieve a significant enhancement in the spatial resolution of a vertical scanning interferometer. We illustrate the potential of this new method using a standard atomic force microscope calibration grid and other materials having motifs of known lateral and vertical dimensions. This approach combines the high vertical resolution of vertical scanning interferometry and its native advantages (large field of view, rapid and nondestructive data acquisition) with important increases in lateral resolution. This combination offers the means to address a common challenge in microscopy: the integration of properties and processes that depend on, and vary as a function of observational length.

摘要

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