Shi Zhendong, Fang Liang, Zhou Chongxi
Appl Opt. 2014 Jan 1;53(1):76-81. doi: 10.1364/AO.53.000076.
We present a new design for the integration of a tunable Fabry-Perot (FP) filter and the grating etched on top of the cavity (IGFP) in the miniature spectrometer. It is based on the predispersion of the grating with the capacity of spatial separation of the spectral component and filter effect of the tunable FP filter. The free spectral range (FSR) of the IGFP is determined by the FSR of the grating, and its resolution depends on the filtering capacity of the FP filter. In the experiment, the high-resolution and wavelength scanning process of the IGFP were demonstrated with a narrowband and broadband light source, respectively. The results of the sub-nanometer resolution agree well with those from a commercial optical spectrum analyzer. Further, the IGFP provides an effective approach to solve the problem of the decrease of spectral resolution in the miniaturization process.
我们展示了一种用于微型光谱仪中可调谐法布里-珀罗（FP）滤波器与刻蚀在腔顶部的光栅（IGFP）集成的新设计。它基于光栅的预色散，具有光谱成分空间分离的能力以及可调谐FP滤波器的滤波效果。IGFP的自由光谱范围（FSR）由光栅的FSR决定，其分辨率取决于FP滤波器的滤波能力。在实验中，分别使用窄带和宽带光源展示了IGFP的高分辨率和波长扫描过程。亚纳米分辨率的结果与商用光谱分析仪的结果吻合良好。此外，IGFP为解决小型化过程中光谱分辨率降低的问题提供了一种有效方法。
