Pang Cheng, Bae Hyungdae, Gupta Ashwani, Bryden Kenneth, Yu Miao
Opt Express. 2013 Sep 23;21(19):21829-39. doi: 10.1364/OE.21.021829.
We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.
我们展示了一种基于微机电系统（MEMS）的法布里-珀罗（FP）传感器以及用于同时进行压力和温度传感的片上光学系统（SOC）询问器。该传感器采用简单结构，具有一个背向空气的硅膜，该硅膜与一根45°抛光光纤交叉轴向键合。这种结构形成了两个级联的FP腔，能够沿光轴在近距离内同时进行压力和温度传感。光学SOC由一个宽带光源、一个MEMS FP可调谐滤波器、一个光电探测器和支持电路组成，用作微型光谱仪以获取两个FP腔的长度。在测量的压力和温度范围内，实验结果表明该传感器对外部压力和温度变化呈现出良好的线性响应。
