Narváez Angela C, Weppelman I Gerward C, Moerland Robert J, Liv Nalan, Zonnevylle A Christiaan, Kruit Pieter, Hoogenboom Jacob P
Opt Express. 2013 Dec 2;21(24):29968-78. doi: 10.1364/OE.21.029968.
Cathodoluminescence (CL) microscopy is an emerging analysis technique in the fields of biology and photonics, where it is used for the characterization of nanometer sized structures. For these applications, the use of transparent substrates might be highly preferred, but the detection of CL from nanostructures on glass is challenging because of the strong background generated in these substrates and the relatively weak CL signal from the nanostructures. We present an imaging system for highly efficient CL detection through the substrate using a high numerical aperture objective lens. This system allows for detection of individual nano-phosphors down to thirty nanometer in size as well as the up to ninth order plasmon resonance modes of a gold nanowire on ITO coated glass. We analyze the CL signal-to-background dependence on the primary electron beam energy and discuss different approaches to minimize its influence on the measurement.
阴极发光（CL）显微镜是生物学和光子学领域中一种新兴的分析技术，用于表征纳米尺寸的结构。对于这些应用，使用透明基板可能是非常可取的，但是由于这些基板中产生的强烈背景以及纳米结构发出的相对较弱的CL信号，检测玻璃上纳米结构的CL具有挑战性。我们提出了一种成像系统，该系统使用高数值孔径物镜通过基板进行高效的CL检测。该系统能够检测尺寸小至30纳米的单个纳米磷光体，以及检测涂有ITO的玻璃上金纳米线的高达九阶的表面等离子体共振模式。我们分析了CL信号与背景对一次电子束能量的依赖性，并讨论了将其对测量影响降至最低的不同方法。
