Leppänen Kimmo, Saarela Juha, Myllylä Risto, Fabritius Tapio
Opt Express. 2013 Dec 30;21(26):32358-70. doi: 10.1364/OE.21.032358.
Measuring conductive thin film properties during production and in end products is a challenge. The main demands for the measurements are: production control, reliability and functionality in final applications. There are several ways to measure thin film quality in a laboratory environment, however these methods are poorly applicable for production facilities. In order to bypass the limitations of existing methods, a simple synchronized heating and IR-imaging based system was implemented. To demonstrate the proposed method, Indium Tin Oxide (ITO) was selected as an example of conductive thin films. PET-ITO films were bent to obtain samples with defects. The proposed method was used and automated signal processing was developed. The results show that the system developed here is suitable for defining breakage types and localizing defects.
在生产过程中和最终产品中测量导电薄膜的特性是一项挑战。测量的主要要求是：生产控制、最终应用中的可靠性和功能性。在实验室环境中有几种测量薄膜质量的方法，然而这些方法在生产设施中适用性较差。为了克服现有方法的局限性，实施了一种基于简单同步加热和红外成像的系统。为了演示所提出的方法，选择氧化铟锡（ITO）作为导电薄膜的示例。将PET-ITO薄膜弯曲以获得有缺陷的样品。使用了所提出的方法并开发了自动信号处理。结果表明，这里开发的系统适用于定义破损类型和定位缺陷。
