Micro- and Nano-manufacturing Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University , 28 Xianning Road, Xi'an 710049, People's Republic of China.
ACS Appl Mater Interfaces. 2014 Feb 26;6(4):2213-8. doi: 10.1021/am4052393. Epub 2014 Feb 17.
Biomimetic dry adhesives have many attractive features, such as reversible and repeatable adhesion against various surfaces. This paper presents a method for the simple fabrication of biomimetic dry adhesives composed of a mushroom-shaped structure, which is based on conventional photolithography and molding. Firstly a masked and a maskless exposure are performed on the top and bottom of a photoresist, respectively, that generates microholes with an undercut after development. This structured photoresist is then used for molding, leading to mushroom-shaped structural features after sacrificing the photoresist. Because of the convenience of photolithography, the proposed method has the potential to fabricate various dry adhesives cost-efficiently.
仿生干式粘合剂具有许多吸引人的特点，例如可在各种表面上实现可逆和可重复的粘附。本文提出了一种简单的方法来制造基于常规光刻和模塑的蘑菇状结构的仿生干式粘合剂。首先在光刻胶的顶部和底部分别进行掩模曝光和无掩模曝光，之后在显影后生成具有底切的微孔。然后，将这种结构化的光刻胶用于模塑，在牺牲光刻胶后得到蘑菇状结构特征。由于光刻的便利性，该方法具有以低成本高效地制造各种干式粘合剂的潜力。
