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通过为光学相干断层扫描数据开发的自动边界检测算法对多层陶瓷材料进行快速准确的计量。

Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data.

作者信息

Ekberg Peter, Su Rong, Chang Ernest W, Yun Seok Hyun, Mattsson Lars

出版信息

J Opt Soc Am A Opt Image Sci Vis. 2014 Feb 1;31(2):217-26. doi: 10.1364/JOSAA.31.000217.

DOI:10.1364/JOSAA.31.000217
PMID:24562018
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4092166/
Abstract

Optical coherence tomography (OCT) is useful for materials defect analysis and inspection with the additional possibility of quantitative dimensional metrology. Here, we present an automated image-processing algorithm for OCT analysis of roll-to-roll multilayers in 3D manufacturing of advanced ceramics. It has the advantage of avoiding filtering and preset modeling, and will, thus, introduce a simplification. The algorithm is validated for its capability of measuring the thickness of ceramic layers, extracting the boundaries of embedded features with irregular shapes, and detecting the geometric deformations. The accuracy of the algorithm is very high, and the reliability is better than 1 μm when evaluating with the OCT images using the same gauge block step height reference. The method may be suitable for industrial applications to the rapid inspection of manufactured samples with high accuracy and robustness.

摘要

光学相干断层扫描(OCT)对于材料缺陷分析和检测很有用,还具备进行定量尺寸计量的额外可能性。在此,我们提出一种用于先进陶瓷3D制造中卷对卷多层结构OCT分析的自动化图像处理算法。它具有避免滤波和预设建模的优点,因此将带来简化。该算法在测量陶瓷层厚度、提取形状不规则的嵌入特征边界以及检测几何变形方面的能力得到了验证。该算法的精度非常高,在使用相同量块步高参考的OCT图像进行评估时,可靠性优于1μm。该方法可能适用于工业应用,以高精度和稳健性对制造的样品进行快速检测。

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Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data.通过为光学相干断层扫描数据开发的自动边界检测算法对多层陶瓷材料进行快速准确的计量。
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