Center for Novel Material Science Under Multi-Extreme Conditions, Graduate School of Material Science, University of Hyogo, 3-2-1 Kouto, Kamigori, Ako, Hyogo 578-1297, Japan.
NTT Advanced Technology Corporation, 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan.
J Synchrotron Radiat. 2014 Mar;21(Pt 2):446-8. doi: 10.1107/S1600577513034644. Epub 2014 Jan 14.
The experimental procedure for obtaining the point spread function (PSF) of a focusing beam generated using an X-ray multilayer zone plate (MZP) with a narrow annular aperture has been developed. It was possible to reconstruct the PSF by applying the tomographic process to the measured dataset consisting of line spread functions (LSFs) in every radial direction on the focal plane. The LSFs were measured by a knife-edge scanning method of detecting scattered intensity. In the experimental work, quasi-monochromatic undulator radiation with a first harmonic energy of 20 keV was directly focused without a monochromator by the MZP, and the PSF was measured using this procedure. As a result, a near diffraction-limited focused beam size of 46 nm full width at half-maximum was obtained.
已经开发出了一种获取使用具有窄环形孔径的 X 射线多层膜波带片（MZP）聚焦光束的点扩散函数（PSF）的实验程序。通过对在焦平面上的每个径向方向上的线扩散函数（LSF）的测量数据集应用层析成像过程，就有可能重建 PSF。LSF 是通过检测散射强度的刀口扫描方法来测量的。在实验工作中，MZP 直接聚焦了第一谐波能量为 20keV 的准单色波荡器辐射，而无需单色器，并且使用该程序测量了 PSF。结果，获得了接近衍射极限的聚焦光束尺寸，半最大值全宽为 46nm。
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