Döring F, Robisch A L, Eberl C, Osterhoff M, Ruhlandt A, Liese T, Schlenkrich F, Hoffmann S, Bartels M, Salditt T, Krebs H U
Institut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany.
Opt Express. 2013 Aug 12;21(16):19311-23. doi: 10.1364/OE.21.019311.
Compound optics such as lens systems can overcome the limitations concerning resolution, efficiency, or aberrations which fabrication constraints would impose on any single optical element. In this work we demonstrate unprecedented sub-5 nm point focusing of hard x-rays, based on the combination of a high gain Kirkpatrick-Baez (KB) mirror system and a high resolution W/Si multilayer zone plate (MZP) for ultra-short focal length f. The pre-focusing allows limiting the MZP radius to below 2 μm, compatible with the required 5 nm structure width and essentially unlimited aspect ratios, provided by enabling fabrication technology based on pulsed laser deposition (PLD) and focused ion beam (FIB).
诸如透镜系统之类的复合光学器件可以克服分辨率、效率或像差方面的限制，而制造限制会对任何单个光学元件施加这些限制。在这项工作中，我们展示了前所未有的硬X射线亚5纳米点聚焦，这是基于高增益柯克帕特里克-贝兹（KB）镜系统与用于超短焦距f的高分辨率W/Si多层波带片（MZP）的组合。预聚焦允许将MZP半径限制在2μm以下，这与所需的5纳米结构宽度兼容，并且通过基于脉冲激光沉积（PLD）和聚焦离子束（FIB）的制造技术实现了基本上不受限制的纵横比。
