用于高能X射线纳米成像的圆形多层波带片

Circular multilayer zone plate for high-energy x-ray nano-imaging.

作者信息

Koyama Takahisa, Takano Hidekazu, Konishi Shigeki, Tsuji Takuya, Takenaka Hisataka, Ichimaru Satoshi, Ohchi Tadayuki, Kagoshima Yasushi

机构信息

Graduate School of Material Science, University of Hyogo, Ako, Hyogo, Japan.

出版信息

Rev Sci Instrum. 2012 Jan;83(1):013705. doi: 10.1063/1.3676165.

DOI:10.1063/1.3676165

PMID:22299960

Abstract

A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi(2) and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.

摘要

制备了一个圆形多层波带片（MZP），并使用20keV的X射线评估了其聚焦性能。通过直流磁控溅射在金属丝芯上交替沉积MoSi₂和Si层；所有界面均满足菲涅耳波带条件。通过断层重建将测量的线扩展函数转换为点扩展函数。结果表明，该MZP有潜力实现衍射极限分辨力，利用衍射积分计算得出其为35nm。此外，使用该MZP的扫描透射显微镜能够分辨出50nm的线宽和间距图案。