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一种用于传感应用的硅-聚二甲基硅氧烷混合光流体平台。

A hybrid silicon-PDMS optofluidic platform for sensing applications.

作者信息

Testa Genni, Persichetti Gianluca, Sarro Pasqualina M, Bernini Romeo

机构信息

Institute for Electromagnetic Sensing of the Environment (IREA), National Research Council, (CNR), Via Diocleziano 328, 80124 Napoli, Italy.

DIMES-ECTM, Delft University of Technology, Feldmannweg 17, 2628 CT Delft, The Netherlands.

出版信息

Biomed Opt Express. 2014 Jan 9;5(2):417-26. doi: 10.1364/BOE.5.000417. eCollection 2014 Feb 1.

DOI:10.1364/BOE.5.000417
PMID:24575337
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3920873/
Abstract

A hybrid silicon-poly(dimethysiloxane) (PDMS) optofluidic platform for lab-on-a-chip applications is proposed. A liquid-core waveguide with a self-aligned solid-core waveguide and a microfluidic device are integrated with a multilayer approach, resulting in a three-dimensional device assembly. The optofluidic layer was fabricated with a hybrid silicon-polymer technology, whereas the microfluidic layer was fabricated with a soft lithography technique. The combination of different materials and fabrication processes allows a modular approach, enabling both the benefits from the high optical quality achievable with silicon technology and the low cost of polymer processing. The proposed chip has been tested for fluorescence measurements on Cy5 water solutions, demonstrating the possibility to obtain a limit of detection of 2.5 nM.

摘要

提出了一种用于芯片实验室应用的混合硅 - 聚二甲基硅氧烷(PDMS)光流控平台。具有自对准实心波导的液芯波导和微流控装置通过多层方法集成在一起,形成了一个三维器件组件。光流控层采用混合硅 - 聚合物技术制造,而微流控层采用软光刻技术制造。不同材料和制造工艺的结合允许采用模块化方法,既能实现硅技术可达到的高光学质量的优点,又能实现聚合物加工的低成本。所提出的芯片已针对Cy5水溶液进行了荧光测量测试,证明了获得2.5 nM检测限的可能性。

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