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引导石英上水平 GaN 纳米线的生长及其向其他衬底的转移。

Guided growth of horizontal GaN nanowires on quartz and their transfer to other substrates.

机构信息

Department of Materials and Interfaces and ‡Chemical Research Support, Weizmann Institute of Science , Rehovot 76100, Israel.

出版信息

ACS Nano. 2014 Mar 25;8(3):2838-47. doi: 10.1021/nn4066523. Epub 2014 Mar 6.

Abstract

The guided growth of horizontal nanowires has so far been demonstrated on a limited number of substrates. In most cases, the nanowires are covalently bonded to the substrate where they grow and cannot be transferred to other substrates. Here we demonstrate the guided growth of well-aligned horizontal GaN nanowires on quartz and their subsequent transfer to silicon wafers by selective etching of the quartz while maintaining their alignment. The guided growth was observed on different planes of quartz with varying degrees of alignment. We characterized the crystallographic orientations of the nanowires and proposed a new mechanism of "dynamic graphoepitaxy" for their guided growth on quartz. The transfer of the guided nanowires enabled the fabrication of back-gated field-effect transistors from aligned nanowire arrays on oxidized silicon wafers and the production of crossbar arrays. The guided growth of transferrable nanowires opens up the possibility of massively parallel integration of nanowires into functional systems on virtually any desired substrate.

摘要

目前,水平纳米线的定向生长仅在少数衬底上得到了验证。在大多数情况下,纳米线与生长的衬底通过共价键结合,并且无法转移到其他衬底上。在这里,我们展示了在石英上进行的取向良好的水平 GaN 纳米线的定向生长,以及通过选择性刻蚀石英来实现它们到硅片的转移,同时保持其取向。在不同晶面的石英上观察到了不同程度的取向生长。我们对纳米线的晶向进行了表征,并提出了一种新的“动态图形外延”机制来解释它们在石英上的定向生长。导向纳米线的转移使得能够在氧化硅片上的对准纳米线阵列上制造背栅场效应晶体管,并制作叉指数组。可转移纳米线的定向生长为将纳米线大规模并行集成到几乎任何所需衬底的功能系统中开辟了可能性。

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