Hirata K, Saitoh Y, Chiba A, Yamada K, Matoba S, Narumi K
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan.
Takasaki Advanced Radiation Research Institute (TARRI), Japan Atomic Energy Agency (JAEA), Takasaki, Gumma 370-1292, Japan.
Rev Sci Instrum. 2014 Mar;85(3):033107. doi: 10.1063/1.4869036.
We developed time-of-flight (TOF) secondary ion (SI) mass spectrometry that provides informative SI ion mass spectra without needing a sophisticated ion beam pulsing system. In the newly developed spectrometry, energetic large cluster ions with energies of the order of sub MeV or greater are used as primary ions. Because their impacts on the target surface produce high yields of SIs, the resulting SI mass spectra are informative. In addition, the start signals necessary for timing information on primary ion incidence are provided by the detection signals of particles emitted from the rear surface of foil targets upon transmission of the primary ions. This configuration allows us to obtain positive and negative TOF SI mass spectra without pulsing system, which requires precise control of the primary ions to give the spectra with good mass resolution. We also successfully applied the TOF SI mass spectrometry with energetic cluster ion impacts to the chemical structure characterization of organic thin film targets.
我们开发了飞行时间（TOF）二次离子（SI）质谱仪，它无需复杂的离子束脉冲系统就能提供信息丰富的SI离子质谱。在新开发的质谱仪中，能量约为亚兆电子伏特或更高的高能大簇离子被用作初级离子。由于它们对靶表面的撞击会产生高产率的二次离子，因此得到的SI质谱信息丰富。此外，通过初级离子透过箔靶后表面发射的粒子的检测信号来提供初级离子入射定时信息所需的起始信号。这种配置使我们能够在没有脉冲系统的情况下获得正、负TOF SI质谱，而脉冲系统需要精确控制初级离子以给出具有良好质量分辨率的质谱。我们还成功地将具有高能簇离子撞击的TOF SI质谱应用于有机薄膜靶的化学结构表征。
