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电子全息术系列求和中的相位测量误差。

Phase measurement error in summation of electron holography series.

作者信息

McLeod Robert A, Bergen Michael, Malac Marek

机构信息

Department of Physics, University of Alberta, Edmonton, AB, Canada T6G 2E1; National Institute for Nanotechnology, 11421 Saskatchewan Dr., Edmonton, AB, Canada T6G 2M9.

National Institute for Nanotechnology, 11421 Saskatchewan Dr., Edmonton, AB, Canada T6G 2M9.

出版信息

Ultramicroscopy. 2014 Jun;141:38-50. doi: 10.1016/j.ultramic.2014.03.001. Epub 2014 Mar 21.

Abstract

Off-axis electron holography is a method for the transmission electron microscope (TEM) that measures the electric and magnetic properties of a specimen. The electrostatic and magnetic potentials modulate the electron wavefront phase. The error in measurement of the phase therefore determines the smallest observable changes in electric and magnetic properties. Here we explore the summation of a hologram series to reduce the phase error and thereby improve the sensitivity of electron holography. Summation of hologram series requires independent registration and correction of image drift and phase wavefront drift, the consequences of which are discussed. Optimization of the electro-optical configuration of the TEM for the double biprism configuration is examined. An analytical model of image and phase drift, composed of a combination of linear drift and Brownian random-walk, is derived and experimentally verified. The accuracy of image registration via cross-correlation and phase registration is characterized by simulated hologram series. The model of series summation errors allows the optimization of phase error as a function of exposure time and fringe carrier frequency for a target spatial resolution. An experimental example of hologram series summation is provided on WS2 fullerenes. A metric is provided to measure the object phase error from experimental results and compared to analytical predictions. The ultimate experimental object root-mean-square phase error is 0.006 rad (2π/1050) at a spatial resolution less than 0.615 nm and a total exposure time of 900 s. The ultimate phase error in vacuum adjacent to the specimen is 0.0037 rad (2π/1700). The analytical prediction of phase error differs with the experimental metrics by +7% inside the object and -5% in the vacuum, indicating that the model can provide reliable quantitative predictions.

摘要

离轴电子全息术是一种用于透射电子显微镜(TEM)的方法,用于测量样品的电学和磁学性质。静电势和磁势会调制电子波前相位。因此,相位测量误差决定了电学和磁学性质中可观测到的最小变化。在此,我们探讨全息图序列的求和,以减少相位误差,从而提高电子全息术的灵敏度。全息图序列的求和需要对图像漂移和相位波前漂移进行独立配准和校正,并讨论了其后果。研究了用于双棱镜配置的TEM电光配置的优化。推导并通过实验验证了由线性漂移和布朗随机游走组合而成的图像和相位漂移分析模型。通过模拟全息图序列表征了基于互相关的图像配准和相位配准的精度。序列求和误差模型允许根据目标空间分辨率,将相位误差作为曝光时间和条纹载波频率的函数进行优化。给出了在WS2富勒烯上进行全息图序列求和的实验示例。提供了一种根据实验结果测量物体相位误差的度量标准,并与分析预测进行了比较。在空间分辨率小于0.615 nm且总曝光时间为900 s时,最终实验物体的均方根相位误差为0.006 rad(2π/1050)。样品附近真空中的最终相位误差为0.0037 rad(2π/1700)。物体内部相位误差的分析预测与实验度量标准相差+7%,真空中相差-5%,这表明该模型可以提供可靠定量预测。

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