Park Yongseob, Kim Eung Kwon, Lee Suho, Lee Jaehyeong
J Nanosci Nanotechnol. 2014 May;14(5):3880-3. doi: 10.1166/jnn.2014.8132.
In this work, cadmium sulfide (CdS) films were deposited on flexible polymer substrates such as polycarbonate (PC) and polyethylene terephthalate (PET). The r.f. magnetron sputtering, which is cost-effective scalable technique, was used for the film deposition. The structural and optical properties of the films grown at different sputtering pressures were investigated. When the CdS film was deposited at lower pressure, the crystallinity and the preferred orientation toward c-axis in hexagonal phase was improved. However, the optical transmittance was reduced as the sputtering pressure was decreased. Compared with the glass substrate, CdS films grown on polymer substrates were exhibited some wore structural and optical characteristics. CdTe thin film solar cell applied to sputtered CdS as a window layer showed a maximum efficiency of 11.6%.
在这项工作中,硫化镉(CdS)薄膜沉积在聚碳酸酯(PC)和聚对苯二甲酸乙二酯(PET)等柔性聚合物基板上。采用具有成本效益且可扩展的射频磁控溅射技术进行薄膜沉积。研究了在不同溅射压力下生长的薄膜的结构和光学性质。当在较低压力下沉积CdS薄膜时,六方相的结晶度和沿c轴的择优取向得到改善。然而,随着溅射压力降低,光学透过率会降低。与玻璃基板相比,在聚合物基板上生长的CdS薄膜表现出一些不同的结构和光学特性。应用溅射CdS作为窗口层的碲化镉薄膜太阳能电池显示出最高效率为11.6%。