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沉积工作功率对用于光伏应用的射频溅射碲化镉薄膜物理性能的影响。

Effect of Deposition Working Power on Physical Properties of RF-Sputtered CdTe Thin Films for Photovoltaic Applications.

作者信息

Răduță Ana-Maria, Panaitescu Ana-Maria, Manica Marina, Iftimie Sorina, Antohe Vlad-Andrei, Toma Ovidiu, Radu Adrian, Ion Lucian, Suchea Mirela Petruta, Antohe Ștefan

机构信息

R&D Center for Materials and Electronic & Optoelectronic Devices (MDEO), Faculty of Physics, University of Bucharest, Atomiștilor Street 405, 077125 Măgurele, Ilfov, Romania.

National Institute for Research and Development in Microtechnologies IMT-Bucharest, 023573 Voluntari, Ilfov, Romania.

出版信息

Nanomaterials (Basel). 2024 Mar 18;14(6):535. doi: 10.3390/nano14060535.

Abstract

The main objective of this study was to determine the variation in the properties of cadmium telluride (CdTe) thin films deposited on a p-type Si substrate by the radio frequency magnetron sputtering technique at four different working powers (70 W, 80 W, 90 W, and 100 W). The substrate temperature, working pressure, and deposition time during the deposition process were kept constant at 220 °C, 0.46 Pa, and 30 min, respectively. To study the structural, morphological, and optical properties of the CdTe films grown under the mentioned experimental conditions, X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and optical spectroscopy were used. For a better analysis of the films' structural and optical properties, a group of films were deposited onto optical glass substrates under similar deposition conditions. The electrical characterisation of Ag/CdTe/Al "sandwich" structures was also performed using current-voltage characteristics in the dark at different temperatures. The electrical measurements allowed the identification of charge transport mechanisms through the structure. New relevant information released by the present study points towards 90 W RF power as the optimum for obtaining a high crystallinity of ~1 μm nanostructured thin films deposited onto p-Si and optical glass substrates with optical and electrical properties that are suitable for use as absorber layers. The obtained high-quality CdTe nanostructured thin films are perfectly suitable for use as absorbers in CdTe thin-film photovoltaic cells.

摘要

本研究的主要目的是确定通过射频磁控溅射技术在四种不同工作功率(70瓦、80瓦、90瓦和100瓦)下沉积在p型硅衬底上的碲化镉(CdTe)薄膜的性能变化。沉积过程中的衬底温度、工作压力和沉积时间分别保持恒定在220°C、0.46帕和30分钟。为了研究在上述实验条件下生长的CdTe薄膜的结构、形态和光学性能,使用了X射线衍射(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)和光谱学。为了更好地分析薄膜的结构和光学性能,在类似的沉积条件下将一组薄膜沉积在光学玻璃衬底上。还使用不同温度下黑暗中的电流-电压特性对Ag/CdTe/Al“三明治”结构进行了电学表征。电学测量有助于确定通过该结构的电荷传输机制。本研究发布的新的相关信息表明,90瓦射频功率是在p-Si和光学玻璃衬底上获得具有适合用作吸收层的光学和电学性能的~1μm纳米结构薄膜高结晶度的最佳选择。所获得的高质量CdTe纳米结构薄膜非常适合用作CdTe薄膜光伏电池中的吸收体。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1fe6/10975583/399ee1845b38/nanomaterials-14-00535-g001.jpg

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