Yang Shaoming, Chen Xiuqin, Yamamoto Kazuo, Iitake Masanori, Nishio-Hamane D, Sakai Hideki, Abe Masahiko
J Nanosci Nanotechnol. 2014 Jun;14(6):4292-6. doi: 10.1166/jnn.2014.8642.
The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.
通过显微镜技术研究了化学气相沉积（CVD）合成的、线圈直径为几微米的氮化钛（TiN）先进陶瓷微弹簧（CMS）的结构和功能特性。这些微弹簧具有足够的机械弹性，能够伸展至其原始尺寸的1.3倍以上，并且在释放张力后会自发收缩至原始状态。为了探索它们在微器件中的应用，开发了一种制造TiN-CMS微电路元件的方法。这些元件的电流-电压（I-V）曲线表明，微弹簧的导电性与金属相当。
