Institute of Experimental and Applied Physics, University of Regensburg, D-93053 Regensburg, Germany.
Beilstein J Nanotechnol. 2014 Apr 4;5:407-12. doi: 10.3762/bjnano.5.48. eCollection 2014.
In frequency modulation atomic force microscopy (FM-AFM) the stability of the eigenfrequency of the force sensor is of key importance for highest precision force measurements. Here, we study the influence of temperature changes on the resonance frequency of force sensors made of quartz, in a temperature range from 4.8-48 K. The sensors are based on the qPlus and length extensional principle. The frequency variation with temperature T for all sensors is negative up to 30 K and on the order of 1 ppm/K, up to 13 K, where a distinct kink appears, it is linear. Furthermore, we characterize a new type of miniaturized qPlus sensor and confirm the theoretically predicted reduction in detector noise.
在调频原子力显微镜（FM-AFM）中，力传感器本征频率的稳定性对于最高精度的力测量至关重要。在这里，我们研究了温度变化对石英制成的力传感器的共振频率的影响，温度范围为 4.8-48 K。这些传感器基于 qPlus 和长度拉伸原理。所有传感器的频率随温度 T 的变化在 30 K 以下且约为 1 ppm/K，在 13 K 左右出现明显拐点，呈线性变化。此外，我们还对一种新型微型 qPlus 传感器进行了特性描述，并证实了探测器噪声的理论预测降低。
