Clayton Garrett M, Dudley Christopher J, Leang Kam K
Department of Mechanical Engineering, Villanova University, Villanova, Pennsylvania 19085, USA.
Department of Mechanical Engineering, University of Nevada-Reno, Reno, Nevada 89557-0312, USA.
Rev Sci Instrum. 2014 Apr;85(4):045003. doi: 10.1063/1.4870903.
A novel dual-stage nanopositioner control framework is presented that considers range constraints. Dual-stage nanopositioners are becoming increasingly popular in applications such as scanning probe microscopy due to their unique ability to achieve long-range and high-speed operation. The proposed control approach addresses the issue that some precision positioning trajectories are not achievable through existing control schemes. Specifically, short-range, low-speed inputs are typically diverted to the long-range actuator, which coincidentally has lower positioning resolution. This approach then limits the dual-stage nanopositioner's ability to achieve the required positioning resolution that is needed in applications where range and frequency are not inversely correlated (which is a typical, but not always the correct assumption for dual stage systems). The proposed range-based control approach is proposed to overcome the limitations of existing control methods. Experimental results show that the proposed control strategy is effective.
提出了一种考虑范围约束的新型双级纳米定位器控制框架。双级纳米定位器由于其实现长距离和高速操作的独特能力，在扫描探针显微镜等应用中越来越受欢迎。所提出的控制方法解决了现有控制方案无法实现某些精确定位轨迹的问题。具体而言，短距离、低速输入通常会被转移到长距离致动器，而长距离致动器的定位分辨率恰好较低。这种方法限制了双级纳米定位器在范围和频率不呈负相关的应用中实现所需定位分辨率的能力（这是双级系统的典型但并非总是正确的假设）。提出了基于范围的控制方法以克服现有控制方法的局限性。实验结果表明所提出的控制策略是有效的。
