Gupta Priyanka, Piyush P, Sriramshankar R, Jayanth G R
Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India.
Rev Sci Instrum. 2019 Mar;90(3):035002. doi: 10.1063/1.5055715.
High speed in-plane (X-Y) nanopositioners are of central importance in scanning probe microscopy for performing fast imaging and manipulation. Reducing the size of the nanopositioning stage improves the response speed of the positioner but also introduces challenges in integration of conventional motion sensors. This paper presents the design and development of a novel high speed flexure-guided, piezo-electrically actuated nanopositioner with integrated optical beam deflection-based motion sensing. The sensing strategy eliminates spatial constraints even for small stages. A simple lumped-parameter model is proposed for the nanopositioner. Subsequently, the model is used to design and fabricate the nanopositioner. The measurement system is integrated with the nanopositioning stage and is employed to characterize the quasi-static and dynamic response of the stage. Finally, the in-plane motion measurements are employed to control the stage when it is commanded to track both slow- and fast-varying position signals. In both cases, the use of control is shown to significantly improve the tracking accuracy.
高速平面（X - Y）纳米定位器在扫描探针显微镜中对于执行快速成像和操作至关重要。减小纳米定位平台的尺寸可提高定位器的响应速度，但也给传统运动传感器的集成带来了挑战。本文介绍了一种新型的高速柔性引导、压电驱动的纳米定位器的设计与开发，该定位器集成了基于光束偏转的运动传感。这种传感策略即使对于小型平台也消除了空间限制。为该纳米定位器提出了一个简单的集总参数模型。随后，该模型被用于设计和制造纳米定位器。测量系统与纳米定位平台集成在一起，用于表征平台的准静态和动态响应。最后，当命令平台跟踪缓慢变化和快速变化的位置信号时，利用平面运动测量来控制平台。在这两种情况下，都表明使用控制可显著提高跟踪精度。
