A high speed X-Y nanopositioner with integrated optical motion sensing.

High speed in-plane (X-Y) nanopositioners are of central importance in scanning probe microscopy for performing fast imaging and manipulation. Reducing the size of the nanopositioning stage improves the response speed of the positioner but also introduces challenges in integration of conventional motion sensors. This paper presents the design and development of a novel high speed flexure-guided, piezo-electrically actuated nanopositioner with integrated optical beam deflection-based motion sensing. The sensing strategy eliminates spatial constraints even for small stages. A simple lumped-parameter model is proposed for the nanopositioner. Subsequently, the model is used to design and fabricate the nanopositioner. The measurement system is integrated with the nanopositioning stage and is employed to characterize the quasi-static and dynamic response of the stage. Finally, the in-plane motion measurements are employed to control the stage when it is commanded to track both slow- and fast-varying position signals. In both cases, the use of control is shown to significantly improve the tracking accuracy.