通过硅块开发便携式超高真空腔室。

The development of a portable ultrahigh vacuum chamber via silicon block.

作者信息

Chuang Ho-Chiao, Huang Chia-Shiuan

机构信息

Department of Mechanical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan.

出版信息

Rev Sci Instrum. 2014 May;85(5):053107. doi: 10.1063/1.4879115.

DOI:10.1063/1.4879115

PMID:24880353

Abstract

This paper describes a nonmetallic, light weight portable chamber for ultra-high vacuum (UHV) applications. The chamber consists of a processed silicon block anodically bonding five polished Pyrex glass windows and a Pyrex glass adapter, without using any screws, bolts or vacuum adhesives. The design features provide an alternative chamber for UHV applications which require nonmetallic components. We have cyclically baked the chamber up to 180 °C for 160 h and have achieved an ultimate pressure of 1.4 × 10(-9) Torr (limited by our pumping station), with no leak detected. Both Pyrex glass windows and Pyrex glass adapter have been used successfully.

摘要

本文介绍了一种用于超高真空（UHV）应用的非金属、轻质便携式腔室。该腔室由一个经过处理的硅块组成，通过阳极键合连接五个抛光的派热克斯玻璃窗口和一个派热克斯玻璃适配器，无需使用任何螺丝、螺栓或真空粘合剂。这些设计特点为需要非金属部件的超高真空应用提供了一种替代腔室。我们已将该腔室循环烘烤至180°C并持续160小时，最终压力达到1.4×10⁻⁹托（受我们的泵站限制），未检测到泄漏。派热克斯玻璃窗口和派热克斯玻璃适配器均已成功使用。