Drummy Lawrence F
Air Force Research Laboratory, Materials and Manufacturing Directorate, 2941 Hobson Way, Wright Patterson Air Force Base, OH 45433, USA.
Ultramicroscopy. 2014 Oct;145:74-9. doi: 10.1016/j.ultramic.2014.05.001. Epub 2014 May 14.
Low voltage electron microscopy has been applied to many types of materials in the last several decades with great success. The extremely strong interaction of the low voltage electrons with the sample gives high scattering contrast, however it can also result in significant damage of the specimen. Irreparable damage to several types of organic materials results from their large cross section for ionization, or radiolysis, at low voltage. Knock-on damage, which is significant at high voltages for many ceramics, semiconductors, minerals and ordered carbonaceous material such as graphene, is often reduced at low voltages. For organics which damage by radiolysis, measured beam stability increases at higher voltages, but the mass-thickness contrast is also reduced. An increased defocus can be used to generate phase contrast at higher voltages, although it comes at the expense of resolution, as the first zero in the contrast transfer function moves toward larger length scales with increasing defocus. Several examples of low and high voltage (5kV up to 300kV) experimental TEM images of organic-inorganic interfaces are used to demonstrate these phenomena.
在过去几十年里,低电压电子显微镜已成功应用于多种类型的材料。低电压电子与样品之间极强的相互作用产生了高散射对比度,然而这也可能导致样品的显著损伤。几种有机材料由于在低电压下具有较大的电离或辐射分解截面而遭受不可修复的损伤。对于许多陶瓷、半导体、矿物以及有序碳质材料(如石墨烯)而言,在高电压下显著的碰撞损伤在低电压下通常会减少。对于因辐射分解而受损的有机物,在较高电压下测量到的束流稳定性会增加,但质量厚度对比度也会降低。增加散焦可用于在较高电压下产生相位对比度,不过这是以分辨率为代价的,因为随着散焦增加,对比度传递函数中的第一个零点会向更大的长度尺度移动。文中使用了几个有机 - 无机界面的低电压和高电压(5kV至300kV)实验透射电子显微镜图像示例来展示这些现象。