Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China; Scottish Universities Physics Alliance (SUPA), University of West of Scotland, Paisley PA1 2BE, Scotland, United Kingdom.
Scottish Universities Physics Alliance (SUPA), University of West of Scotland, Paisley PA1 2BE, Scotland, United Kingdom.
Ultrasonics. 2014 Sep;54(7):1991-8. doi: 10.1016/j.ultras.2014.05.006. Epub 2014 May 29.
Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.
将 C 轴垂直生长和倾斜角生长的纳米晶 ZnO 薄膜溅射沉积在铝箔（50μm 厚）上，并作为柔性超声换能器进行特性分析。将沉积的 C 轴生长 ZnO 薄膜在不同温度下退火，最高可达 600°C，以提高薄膜结晶度并降低薄膜应力。将 Al 箔上的 C 轴生长 ZnO 薄膜键合到钢板上，脉冲回波测试验证了由沉积和退火后薄膜制成的超声换能器具有良好的性能（具有主导的纵波）。在脉冲回波测试中，Al 箔上胶合的倾斜角 ZnO 薄膜在钢板上产生了混合的剪切波和纵波。
