Dow Ali Badar Alamin, Popov Cyril, Schmid Ulrich, Kherani Nazir P
IEEE Trans Ultrason Ferroelectr Freq Control. 2013 Aug;60(8):1581-6. doi: 10.1109/TUFFC.2013.2738.
SAW devices have been used in a variety of applications including high-volume telecommunications, electronic devices, and advanced sensors. Recently, high-bit-rate data processing in the gigahertz frequency range and ultrahigh-sensitivity sensors have called for the development of advanced SAW transducers. Because of its high acoustic velocity, ultrananocrystalline diamond (UNCD) with a crystal size of 3 to 5 nm, embedded in an amorphous carbon matrix with grain boundaries of 1 to 1.5 nm, is integrated with AlN to extend the operating frequency of SAW devices. We utilize this attractive property of UNCD through the facile synthesis of bilayer architectures consisting of sputtered AlN deposited on UNCD film. The UNCD films were synthesized using microwave plasma-enhanced chemical vapor deposition. The SAW devices were fabricated by electron beam lithography and lift off processes. The fabricated SAW nanodevices exhibit resonance frequencies up to 15.4 GHz. Multiple SAW transducers were fabricated with spatial periods ranging from 580 nm to 3.2 μm.
声表面波（SAW）器件已被应用于各种领域，包括大容量电信、电子设备和先进传感器。最近，千兆赫兹频率范围内的高比特率数据处理和超高灵敏度传感器推动了先进SAW换能器的发展。由于其高声速，晶体尺寸为3至5纳米、嵌入晶界为1至1.5纳米的非晶碳基体中的超纳米晶金刚石（UNCD）与氮化铝（AlN）集成，以扩展SAW器件的工作频率。我们通过在UNCD薄膜上溅射沉积AlN组成的双层结构的简便合成方法，利用了UNCD的这一诱人特性。UNCD薄膜采用微波等离子体增强化学气相沉积法合成。SAW器件通过电子束光刻和剥离工艺制造。所制造的SAW纳米器件展现出高达15.4 GHz的共振频率。制造了多个空间周期范围从580纳米到3.2微米的SAW换能器。
