Safrani Avner, Abdulhalim Ibrahim
Opt Lett. 2014 Sep 1;39(17):5220-3. doi: 10.1364/OL.39.005220.
A real-time phase shift interference microscopy system is presented using a polarization-based Linnik interferometer operating with three synchronized, phase-masked, parallel detectors. Using this method, several important applications that require high speed and accuracy, such as dynamic focusing control, tilt measurement, submicrometer roughness measurement, and 3D profiling of fine structures, are demonstrated in 50 volumes per second and with 2 nm height repeatability.
本文介绍了一种基于偏振的林尼克干涉仪的实时相移干涉显微镜系统，该干涉仪与三个同步的、相位掩膜的平行探测器一起工作。使用这种方法，展示了几种需要高速和高精度的重要应用，如动态聚焦控制、倾斜测量、亚微米粗糙度测量以及精细结构的三维轮廓测量，每秒可处理50个体积，高度重复性为2纳米。
