Li Jianping, Zhao Hongwei, Shao Mingkun, Zhou Xiaoqin, Huang Hu, Fan Zunqiang
College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China.
Rev Sci Instrum. 2014 Aug;85(8):085004. doi: 10.1063/1.4892998.
A piezo-driven rotary actuator by means of inchworm principle is proposed in this paper. Six piezo-stacks and flexure hinges are used to realize large rotation ranges with high accuracy both in the forward and backward motions. Four right-angle flexure hinges and two right-circular flexure hinges are applied in the stator. The motion principle and theoretical analysis of the designed actuator are discussed. In order to investigate the working characteristics, a prototype actuator was manufactured and a series of experiment tests were carried out. The test results indicate that the maximum rotation velocity is 71,300 μrad/s; the maximum output torque is 19.6 N mm. The experiment results confirm that the designed actuator can obtain large rotation motion ranges with relatively high output torques and different rotation speeds on the condition of different driving voltages and frequencies.
本文提出了一种基于尺蠖原理的压电驱动旋转执行器。采用六个压电堆和柔性铰链，以实现前后运动中高精度的大旋转范围。定子中应用了四个直角柔性铰链和两个直角圆形柔性铰链。讨论了所设计执行器的运动原理和理论分析。为了研究其工作特性，制造了一个执行器原型并进行了一系列实验测试。测试结果表明，最大旋转速度为71300 μrad/s；最大输出扭矩为19.6 N·mm。实验结果证实，所设计的执行器在不同驱动电压和频率的条件下，能够获得具有较高输出扭矩和不同转速的大旋转运动范围。
