Huang Hu, Fu Lu, Zhao Hongwei, Shi Chengli, Ren Luquan, Li Jianping, Qu Han
College of Mechanical Science and Engineering, Jilin University, Renmin Street 5988, Changchun, Jilin 130025, China.
Rev Sci Instrum. 2013 Sep;84(9):096105. doi: 10.1063/1.4821495.
This paper presents a novel piezo-driven rotary actuator based on the parasitic motion principle. Output performances of the rotary actuator were tested and discussed. Experiment results indicate that using only one piezoelectric actuator and simple sawtooth wave control, the rotary actuator reaches the rotation velocity of about 20,097 μrad/s when the driving voltage is 100 V and the driving frequency is 90 Hz. The actuator can rotate stably with the minimum resolution of 0.7 μrad. This paper verifies feasibility of the parasitic motion principle for applications of rotary actuators, providing new design ideas for precision piezoelectric rotary actuators.
本文提出了一种基于寄生运动原理的新型压电驱动旋转 actuator。对旋转 actuator 的输出性能进行了测试和讨论。实验结果表明，仅使用一个压电 actuator 和简单的锯齿波控制，当驱动电压为 100 V 且驱动频率为 90 Hz 时，旋转 actuator 达到约 20,097 μrad/s 的旋转速度。该 actuator 能够以 0.7 μrad 的最小分辨率稳定旋转。本文验证了寄生运动原理在旋转 actuator 应用中的可行性，为精密压电旋转 actuator 提供了新的设计思路。
