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通过微纳机械谐振器传感器检测吸积粒子的质量和位置。

Detecting both the mass and position of an accreted particle by a micro/nano-mechanical resonator sensor.

作者信息

Zhang Yin, Liu Yun

机构信息

State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China.

Faculty of Information and Automation, Kunming University of Science and Technology, Kunming 650051, China.

出版信息

Sensors (Basel). 2014 Sep 2;14(9):16296-310. doi: 10.3390/s140916296.

Abstract

In the application of a micro-/nano-mechanical resonator, the position of an accreted particle and the resonant frequencies are measured by two different physical systems. Detecting the particle position sometimes can be extremely difficult or even impossible, especially when the particle is as small as an atom or a molecule. Using the resonant frequencies to determine the mass and position of an accreted particle formulates an inverse problem. The Dirac delta function and Galerkin method are used to model and formulate an eigenvalue problem of a beam with an accreted particle. An approximate method is proposed by ignoring the off-diagonal elements of the eigenvalue matrix. Based on the approximate method, the mass and position of an accreted particle can be decoupled and uniquely determined by measuring at most three resonant frequencies. The approximate method is demonstrated to be very accurate when the particle mass is small, which is the application scenario for much of the mass sensing of micro-/nano-mechanical  resonators. By solving the inverse problem,  the position measurement becomes unnecessary, which is of some help to the mass sensing application  of a micro-/nano-mechanical resonator by reducing two measurement systems to one. How to apply the method to the general scenario of multiple accreted particles is also discussed.

摘要

在微纳机械谐振器的应用中,附着粒子的位置和谐振频率是由两个不同的物理系统测量的。检测粒子位置有时可能极其困难甚至不可能,尤其是当粒子小到原子或分子大小时。利用谐振频率来确定附着粒子的质量和位置构成了一个反问题。狄拉克δ函数和伽辽金方法被用于对带有附着粒子的梁的特征值问题进行建模和公式化。通过忽略特征值矩阵的非对角元素,提出了一种近似方法。基于该近似方法,通过最多测量三个谐振频率,附着粒子的质量和位置可以解耦并唯一确定。当粒子质量较小时,该近似方法被证明非常准确,这是微纳机械谐振器许多质量传感的应用场景。通过解决反问题,则无需进行位置测量,这通过将两个测量系统简化为一个,对微纳机械谐振器的质量传感应用有所帮助。还讨论了如何将该方法应用于多个附着粒子的一般场景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/92fc/4208176/7c0cc604bac8/sensors-14-16296f1.jpg

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