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用于仿生流量传感的磁性纳米复合材料。

A magnetic nanocomposite for biomimetic flow sensing.

作者信息

Alfadhel A, Li B, Zaher A, Yassine O, Kosel J

机构信息

Computer, Electrical and Mathematical Sciences and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955, Saudi Arabia.

出版信息

Lab Chip. 2014 Nov 21;14(22):4362-9. doi: 10.1039/c4lc00821a.

Abstract

A magnetic nanocomposite has been implemented as artificial hair on a giant magnetoimpedance (GMI) thin-film sensor for flow sensing. The 500 μm long and 100 μm in diameter pillars are composed of iron nanowires incorporated in polydimethylsiloxane (PDMS). The nanowires' length and diameter are 6 μm and 35 nm, respectively. Upon fluid flow, the pillars are deflected, causing a change in the magnetic field at the GMI element and a corresponding change in impedance. The permanent magnetic behavior of the nanowires in combination with the GMI sensor and the high elasticity of the PDMS pillars result in a high-performance flow sensor with low power consumption and potential for remote detection. No additional magnetic field is required to magnetize the nanowires or bias the sensor, which simplifies miniaturization and integration in microsystems. At a power consumption of 31.6 μW, air flow rates up to 190 mm s(-1) can be detected with a sensitivity of 24 mΩ (mm)(-1) s and a resolution of 0.56 mm s(-1) while the range for water flow is up to 7.8 mm s(-1) with a sensitivity of 0.9 Ω (mm)(-1) s and a resolution of 15 μm s(-1). When power consumption is reduced to as low as 80 nW a high resolution of 32 μm s(-1) is still maintained.

摘要

一种磁性纳米复合材料已被用作巨型磁阻抗(GMI)薄膜传感器上的人造毛发用于流量传感。这些长度为500μm、直径为100μm的柱体由掺入聚二甲基硅氧烷(PDMS)中的铁纳米线组成。纳米线的长度和直径分别为6μm和35nm。当流体流动时,柱体会发生偏转,导致GMI元件处的磁场发生变化以及相应的阻抗变化。纳米线的永磁行为与GMI传感器以及PDMS柱体的高弹性相结合,产生了一种低功耗且具有远程检测潜力的高性能流量传感器。无需额外的磁场来磁化纳米线或使传感器偏置,这简化了微系统中的小型化和集成。在功耗为31.6μW时,可检测到高达190mm s⁻¹的空气流速,灵敏度为24mΩ(mm)⁻¹ s,分辨率为0.56mm s⁻¹,而水流范围高达7.8mm s⁻¹,灵敏度为0.9Ω(mm)⁻¹ s,分辨率为15μm s⁻¹。当功耗降低至低至80nW时,仍可保持32μm s⁻¹的高分辨率。

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