一种基于柔性双层磁纤毛的触觉和气流运动传感器。
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia.
作者信息
Man Jiandong, Zhang Junjie, Chen Guangyuan, Xue Ning, Chen Jiamin
机构信息
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, 100190 Beijing, People's Republic of China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, 100049 Beijing, People's Republic of China.
出版信息
Microsyst Nanoeng. 2023 Jan 17;9:12. doi: 10.1038/s41378-022-00478-9. eCollection 2023.
Inspired by the concept of bionics, a tactile and airflow motion sensor based on flexible double-layer magnetic cilia is developed, showing extremely high sensitivity in both force and airflow detection. The upper layer of the magnetic cilia is a flexible material mixed with magnetic particles, while the lower layer is a pure flexible material. This double-layer structure significantly improves magnetism while maintaining cilia flexibility. In addition, a metal tube pressing (MTP) method is proposed to overcome the difficulties in preparing large aspect ratio (over 30:1) cilia, offering simplicity and avoiding the use of large-scale MEMS instruments. The developed sensor has a detection range between 0 and 60 µN with a resolution of 2.1 µN for micro forces. It also shows great detection ability for airflow velocity with a sensitivity of 1.43 µT/(m/s). Experiments show that the sensor could be applied in surface roughness characterization and sleep apnea monitoring.
受仿生学概念启发，开发了一种基于柔性双层磁性纤毛的触觉和气流运动传感器，在力和气流检测方面均表现出极高的灵敏度。磁性纤毛的上层是混合有磁性颗粒的柔性材料，而下层是纯柔性材料。这种双层结构在保持纤毛柔韧性的同时显著提高了磁性。此外，还提出了一种金属管压制（MTP）方法，以克服制备大长宽比（超过30:1）纤毛的困难，该方法操作简单，且无需使用大型微机电系统仪器。所开发的传感器检测范围为0至60 µN，对微力的分辨率为2.1 µN。它对气流速度也具有很强的检测能力，灵敏度为1.43 µT/(m/s)。实验表明，该传感器可应用于表面粗糙度表征和睡眠呼吸暂停监测。
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