Jiang Hao, Lan Di, Goldman Ken, Etemadi Mozziyar, Shahnasser Hamid, Roy Shuvo
School of Engineering, San Francisco State University, San Francisco, CA 94132.
H-Cubed, Inc., Olmsted Falls, OH 44138.
Proc IEEE Radio Wirel Symp. 2011;2011:11-14. doi: 10.1109/BIOWIRELESS.2011.5724342.
A miniature batteryless implantable wireless pressure sensor that can be used deep inside the body is desired by the medical community. MEMS technology makes it possible to achieve high responsivity that directly determines the operating distance between a miniature implanted sensor and the external RF probe, while providing the read-out. In this paper, for the first time, an analytical expression of the system responsivity versus the sensor design is derived using an equivalent circuit model. Also, the integration of micro-coil inductors and pressure sensitive capacitors on a single silicon chip using MEMS fabrication techniques is demonstrated. Further, the derived analytical design theory is validated by the measured responsivity of these sensors.
医学界期望有一种可用于人体深部的微型无电池植入式无线压力传感器。微机电系统（MEMS）技术使得实现高响应度成为可能，这直接决定了微型植入式传感器与外部射频探头之间的工作距离，同时还能实现读出功能。在本文中，首次使用等效电路模型推导出了系统响应度与传感器设计之间的解析表达式。此外，还展示了利用MEMS制造技术将微线圈电感器和压敏电容器集成在单个硅芯片上的过程。进一步地，通过这些传感器的实测响应度对推导得出的解析设计理论进行了验证。
